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Ultraviolet broadband film

Ultraviolet broadband films are used in semiconductor equipment, such as lithography machines and wafer defect detection equipment. Typical application wavelengths are 193nm, 248nm, 266nm, and 355nm. These wavelength applications require the absorption of the film material to be controlled at the theoretical limit, and the types of film systems required are complex, posing greater challenges to coating equipment and process capabilities.

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Siteng Product

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Product Description

Bandwidth 260-520nm

Ultraviolet broadband films are used in semiconductor equipment, such as lithography machines and wafer defect detection equipment. Typical application wavelengths are 193nm, 248nm, 266nm, and 355nm. These wavelength applications require the absorption of the film material to be controlled at the theoretical limit, and the types of film systems required are complex, posing greater challenges to coating equipment and process capabilities.

 

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